Title
Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor.
Abstract
A prototype of a nitro compound vapor and trace detector, which uses the pyrolysis method and a capacitive gas sensor based on the metal-insulator-semiconductor (MIS) structure type Pd-SiO2-Si, was developed and manufactured. It was experimentally established that the detection limit of trinitrotoluene trace for the detector prototype is 1 x 10(-9) g, which corresponds to concentration from 10(-11) g/cm(3) to 10(-12) g/cm(3). The prototype had a response time of no more than 30 s. The possibility of further improving the characteristics of the prototype detector by reducing the overall dimensions and increasing the sensitivity of the MIS sensors is shown.
Year
DOI
Venue
2020
10.3390/s20051514
SENSORS
Keywords
DocType
Volume
field effect gas sensor,MIS structure type Pd-SnO2-SiO2-Si,NO2 gas detection in ppb level,pyrolysis of nitro compound vapor
Journal
20
Issue
ISSN
Citations 
5
1424-8220
0
PageRank 
References 
Authors
0.34
0
6
Name
Order
Citations
PageRank
Nikolay Samotaev100.34
Artur Litvinov200.34
Maya Etrekova300.34
Konstantin Oblov400.34
Dmitrii Filipchuk500.34
Alexey Mikhailov600.34