Title
Plasma Modified Silicon Nitride Resistive Switching Memories
Abstract
In this article we present RRAM single-cells based on MIS devices utilizing LPCVD silicon nitride thin layer as resistive switching material. The thin SiN layer was modified by plasma in order to improve the switching characteristics and the overall performance of the memory cell. Extensive material and electronic device characterization are presented.
Year
DOI
Venue
2019
10.1109/NANOARCH47378.2019.181308
2019 IEEE/ACM International Symposium on Nanoscale Architectures (NANOARCH)
Keywords
DocType
ISSN
nitride,resistance switching,resistive-switching memory (RRAM),impedance spectroscopy,Cu electrode
Conference
2327-8218
ISBN
Citations 
PageRank 
978-1-7281-5521-0
0
0.34
References 
Authors
1
8