Title
Sub-nanosecond Reverse Recovery Measurement for ESD Devices
Abstract
A method to measure sub-nanosecond reverse recovery in wafer-level test structures is presented. The setup uses a transmission line pulse generator with a time-domain through connection to measure the device-under-test current. The setup is used to measure reverse recovery in a 65-nm CMOS ESD diode, and it is found that a quasi-static compact model does not accurately describe the observed transient. A non-quasi-static charge control model is used to accurately simulate both the reverse recovery and the forward bias behavior.
Year
DOI
Venue
2020
10.1109/IRPS45951.2020.9129596
2020 IEEE International Reliability Physics Symposium (IRPS)
Keywords
DocType
ISSN
Diodes,electrostatic discharge,semiconductor device measurement,semiconductor device modeling,transmission line measurements
Conference
1541-7026
ISBN
Citations 
PageRank 
978-1-7281-3199-3
0
0.34
References 
Authors
0
3
Name
Order
Citations
PageRank
Alex Ayling100.34
Shudong Huang200.34
Elyse Rosenbaum36121.99