Name
Title | ||
|---|---|---|
A new-designed non-raster scan and precision control for increasing AFM imaging speed |
Abstract | ||
|---|---|---|
Atomic force microscope (AFM) is able to perform high resolution 3-D topography image at a nanometer resolution. This paper demonstrates the amplitude-detection mode atomic force microscopy (AM-AFM) with the proposed modified cycloid trajectory (MCT) for lateral-axes. Besides, the internal model principle-based neural network complementary sliding mode control (IMP-based NNCSMC) approach of designing controller is implemented for the xy-piezoelectric scanner to overcome some non-linear uncertainties or disturbance. Furthermore, the MCT method is a smooth and cycloid-like scan pattern that can avoid the containing frequency in fast axis signal beyond mechanical bandwidth of the scanner such that AFM can achieve higher scan speed than a raster scan. Finally, some comparison results between MCT and raster scan will be provided. |
Year | DOI | Venue |
|---|---|---|
2020 | 10.23919/ACC45564.2020.9147612 | 2020 American Control Conference (ACC) |
Keywords | DocType | ISSN |
Trajectory,Probes,Imaging,Resonant frequency,Piezoelectric actuators,Force,Sliding mode control | Conference | 0743-1619 |
ISBN | Citations | PageRank |
978-1-5386-8266-1 | 0 | 0.34 |
References | Authors | |
0 | 2 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Huang-Chih Chen | 1 | 0 | 2.37 |
| Li-Chen Fu | 2 | 1419 | 196.64 |