Title | ||
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10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization. |
Abstract | ||
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Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr0.52Ti0.48O3(PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to remove a PMUT from an underlying silicon (Si) substrate has enabled curved arrays to be readily formed. This research aimed to improve the design of flexible PMUT arrays using PZFlex, a finite element method software package. A 10 MHz PMUT 2D array working in 3-1 mode was designed. A circular unit-cell was structured from the top, with concentric layers of platinum (Pt)/PZT/Pt/titanium (Ti) on a polyimide (PI) substrate. Pulse-echo and spectral response analyses predicted a center frequency of 10 MHz and bandwidth of 87% under water load and air backing. A 2D array, consisting of the 256 (16 x 16) unit-cells, was created and characterized in terms of pulse-echo and spectral responses, surface displacement profiles, crosstalk, and beam profiles. The 2D array showed: decreased bandwidth due to protracted oscillation decay and guided wave effects; mechanical focal length at 2.9 mm; 3.7 mm depth of field for -6 dB; and -55.6 dB crosstalk. Finite element-based virtual prototyping identified figures of merit-center frequency, bandwidth, depth of field, and crosstalk-that could be optimized to design robust, flexible PMUT arrays. |
Year | DOI | Venue |
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2020 | 10.3390/s20154335 | SENSORS |
Keywords | DocType | Volume |
flexible 2D PMUT arrays,finite element analysis,PZFlex,virtual prototyping,pulse-echo,spectral response,surface displacement,bandwidth,crosstalk,beam profiles | Journal | 20 |
Issue | ISSN | Citations |
15 | 1424-8220 | 0 |
PageRank | References | Authors |
0.34 | 0 | 7 |
Name | Order | Citations | PageRank |
---|---|---|---|
Jeong Nyeon Kim | 1 | 0 | 0.68 |
Tianning Liu | 2 | 0 | 0.68 |
T N Jackson | 3 | 24 | 3.54 |
Kyusun Choi | 4 | 0 | 0.68 |
S Trolier-McKinstry | 5 | 10 | 2.13 |
Richard L. Tutwiler | 6 | 45 | 5.80 |
Judith A. Todd | 7 | 0 | 1.01 |