Name
Title | ||
|---|---|---|
Detecting and Scoring Equipment Faults in Real Time During Semiconductor Test Processes |
Abstract | ||
|---|---|---|
This article proposes a robust calculation method for the identification of anomalies in IC manufacturing test data while eliminating the need of large storage of raw measurements. |
Year | DOI | Venue |
|---|---|---|
2021 | 10.1109/MDAT.2020.3036591 | IEEE Design & Test |
Keywords | DocType | Volume |
anomaly detection,collective anomaly,equipment faults,robust statistics,semiconductor test processes | Journal | 38 |
Issue | ISSN | Citations |
4 | 2168-2356 | 0 |
PageRank | References | Authors |
0.34 | 0 | 6 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Yi-Hsin Wu | 1 | 0 | 0.34 |
| Jui-Yu Huang | 2 | 0 | 0.34 |
| Yi-Chun Yao | 3 | 0 | 0.34 |
| Yin-Jing Tien | 4 | 0 | 0.34 |
| Cheng-Juei Yu | 5 | 0 | 0.34 |
| Sheng-De Wang | 6 | 720 | 68.13 |