Name
Title | ||
|---|---|---|
A New Double Exponentially Weighted Moving Average Run-to-Run Control Using a Disturbance-Accumulating Strategy for Mixed-Product Mode |
Abstract | ||
|---|---|---|
Mixed-product production is common practice in semiconductor manufacturing and has attracted considerable academic attention recently. The main purpose of the mixed-product mode is to manufacture a wide variety of products in the same time period, to meet customer demand. The complex and changeable group of products is called “mixed-product production mode.” A specific tool used and a specific pro... |
Year | DOI | Venue |
|---|---|---|
2021 | 10.1109/TASE.2020.3021949 | IEEE Transactions on Automation Science and Engineering |
Keywords | DocType | Volume |
Process control,Production,Tools,Integrated circuits,Schedules,Mathematical model | Journal | 18 |
Issue | ISSN | Citations |
4 | 1545-5955 | 2 |
PageRank | References | Authors |
0.39 | 0 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Shu-Kai S. Fan | 1 | 280 | 17.82 |
| Chih-Hung Jen | 2 | 103 | 6.67 |
| Chia-Yu Hsu | 3 | 11 | 2.96 |
| Yu-Ling Liao | 4 | 2 | 0.39 |