Paper Info
Title
Low-Cost Parylene Based Micro Humidity Sensor for Integrated Human Thermal Comfort Sensing
Abstract
In this paper, we report a CMOS-MEMS compatible Parylene C based Humidity Sensor (PHS) to be used for integrated human thermal comfort sensing for smart buildings. Interdigitated platinum (Pt) electrodes are deposited on a silicon substrate. A parylene C thin film as hygroscopic layer is coated on the electrodes using room-temperature chemical vapor deposition (CVD) technique. Three sensors with various dimensions (1.2 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , 4.8 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , and 7.5 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) are fabricated to study the size effect of the sensor on the sensitivity. The impedance, phase and capacitive response of the sensor at different frequencies of the operating voltage under various relative humidity (RH) levels are investigated. The overall impedance and capacitance changed from 23.02 to 3.744 MŸ and 64.165 to 194.14 pF respectively at 100 Hz operating frequency for the 4.8 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> sensor when RH is increased from 0.1 to 92%. The measured PHS's sensitivity at the frequencies of 1~100 kHz shows highest (1.428 pF/%RH) at low frequency (100 Hz). The PHS with large sensing area showed higher sensitivity (0.11 ~ 0.53 pF/%RH) compared to medium and small sensors. Moreover, the PHS is tested for 3 days depicting good stability with respect to time.
Year
DOI
Venue
2020
10.1109/NEMS50311.2020.9265630
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)
Keywords
DocType
ISSN
microhumidity sensor,integrated human thermal comfort sensing,humidity sensor,interdigitated platinum electrodes,room-temperature chemical vapor deposition technique,capacitive response,parylene based microhumidity sensor,PHS sensitivity measurement,CMOS-MEMS compatible Parylene C thin film,CVD technique,smart buildings,coating,hygroscopic layer,time 3.0 d,capacitance 64.165 pF to 194.14 pF,frequency 1.0 kHz to 100.0 kHz,Pt
Conference
2474-3747
ISBN
Citations 
PageRank 
978-1-7281-7231-6
0
0.34
References 
Authors
2
5
Name
Order
Citations
PageRank
Izhar101.35
Xiaoyi Wang200.68
Wei Xu332938.14
Hadi Tavakkoli401.01
Yi-Kuen Lee5711.16