Paper Info
Title
Scaling Effect Induced Rapid Quenching Improves the Performance of Microfabricated Electrostatic Micromirrors
Abstract
In this paper we study the scaling effect on the heat transfer of microfabricated electrostatic micromirrors with polysilicon and gold bimorph structure. Based on scaling effect study, it is found that as the characteristic length of micromirror reduces, rapid cooling occurs, and we implemented the scaling effect to perform thermal processing to cause rapid quenching and plastic deformation on microfabricated micromirrors to improve its performance, including the maximum out-of-plane displacement and bandwidth. Electrostatic micromirrors were fabricated by a two-layer polysilicon microfabrication process. Measurement results demonstrated that after the thermal processing, the maximum out-of-plane displacement increased by 60.8%, from 1.25 μm to 2.01 μm, and the 3dB bandwidth was increased by 40.7%, from 1.35 kHz to 1.90 kHz.
Year
DOI
Venue
2020
10.1109/NEMS50311.2020.9265626
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)
Keywords
DocType
ISSN
scaling effect induced rapid quenching,electrostatic micromirrors,heat transfer,gold bimorph structure,rapid cooling,maximum out-of-plane displacement,two-layer polysilicon microfabrication process,thermal processing,plastic deformation,size 1.25 mum to 2.01 mum,frequency 1.35 kHz to 1.9 kHz,Au,Si
Conference
2474-3747
ISBN
Citations 
PageRank 
978-1-7281-7231-6
0
0.34
References 
Authors
0
6
Name
Order
Citations
PageRank
Hao Ren1258.99
Weimin Wang210.77
Haichao Cao300.68
Sitao Fei400.68
Yunping Niu500.68
Zhihao Li613617.95