Name
Abstract | ||
|---|---|---|
We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 mu m thick PZT films that were crystallized on Si substrates at 700 degrees C and transferred to 5 mu m thick solution-cast polyimide via dissolution of an underlying release layer. Underwater pitch-catch testing between two neighboring 100 mu m x 1000 mu m elements showed a 0.2 mV signal at a 1.5 cm distance for a driving voltage of 5 V peak at 9.5 MHz. With the same excitation, a 33 kPa sound pressure output at a 6 mm distance and a 32% bandwidth at -6 dB were measured by hydrophone. |
Year | DOI | Venue |
|---|---|---|
2021 | 10.3390/s21031014 | SENSORS |
Keywords | DocType | Volume |
flexible transducer, PZT pMUT, thin-film transducer, flexible PZT, flexible pMUT, solution-cast polyimide, anisotropic conductive film | Journal | 21 |
Issue | ISSN | Citations |
3 | 1424-8220 | 0 |
PageRank | References | Authors |
0.34 | 0 | 7 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Tianning Liu | 1 | 0 | 0.68 |
| Ajay Dangi | 2 | 0 | 0.68 |
| Jeong Nyeon Kim | 3 | 0 | 0.68 |
| Sri-Rajasekhar Kothapalli | 4 | 0 | 0.34 |
| Kyusun Choi | 5 | 0 | 0.68 |
| Susan Trolier-McKinstry | 6 | 0 | 0.34 |
| Thomas W. Jackson | 7 | 217 | 17.90 |