Paper Info
Title
Traceable Reference Full Metrology Chain For Innovative Aspheric And Freeform Optical Surfaces Accurate At The Nanometer Level
Abstract
The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.
Year
DOI
Venue
2021
10.3390/s21041103
SENSORS
Keywords
DocType
Volume
robust reference minimum zone (Hybrid Trust Region) fitting, aspheric and freeform optical elements, ultra-high precision measuring machine, dimensional metrology, measured data evaluation, uncertainty
Journal
21
Issue
ISSN
Citations 
4
1424-8220
0
PageRank 
References 
Authors
0.34
0
17
Name
Order
Citations
PageRank
Yassir Arezki100.34
Rong Su200.68
Ville Heikkinen300.34
François Leprete400.34
Pavel Posta500.34
Youichi Bitou600.34
Christian Schober700.34
Charyar Mehdi-Souzani800.34
Bandar Abdulrahman Mohammed Alzahrani900.34
Xiangchao Zhang1010.75
Yohan Kondo1100.34
Christof Pruss1200.34
Vit Ledl1300.34
Nabil Anwer1400.34
Mohamed Lamjed Bouazizi1500.34
Richard K. Leach1633.36
Hichem Nouira1700.34