Name
Title | ||
|---|---|---|
Frequency Analysis and Resonance Evaluation of Polymer 1-axis Piezoresistive Microaccelerometers |
Abstract | ||
|---|---|---|
In this paper, we present the fabrication, testing and numerical frequency analysis of 2-beam and 4-beam SU-8 single axis accelerometer with two different beam thicknesses: 4.475 μm and 8.216 μm. Polymer accelerometer structures are simple to fabricate and highly sensitive piezoresistive material can be easily implemented for performance improvement. The dynamic characterization of the devices was performed to measure resonant frequency using Lazer Doppler Vibrometer (LDV). Using extracted dimensions of the prototypes from experimental characterization, dynamic FEM analysis is performed to investigate the frequency response of the devices. Resonant frequency values from experimental study are in good agreement with those obtained from simulation with a maximum error of 18% and 9% for the 2-beam and 4-beam structures, respectively. |
Year | DOI | Venue |
|---|---|---|
2020 | 10.1109/SSD49366.2020.9364140 | 2020 17th International Multi-Conference on Systems, Signals & Devices (SSD) |
Keywords | DocType | ISSN |
SU-8 polymer,piezoresistive,FEM analysis,MEMS,frequency response,accelerometer | Conference | 2474-0438 |
ISBN | Citations | PageRank |
978-1-7281-1081-3 | 0 | 0.34 |
References | Authors | |
0 | 7 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Awatef Khlifi | 1 | 0 | 0.34 |
| Brahim Mezghani | 2 | 0 | 0.68 |
| Shardul Pandit | 3 | 0 | 0.34 |
| Aftab Ahmed | 4 | 0 | 0.34 |
| Rajul Patkar | 5 | 0 | 0.34 |
| Pradeep Dixit | 6 | 0 | 0.34 |
| Maryam Shojaei Baghini | 7 | 0 | 0.34 |