Name
Abstract | ||
|---|---|---|
ABSTRACTIn this paper, we study the impact of critical queue time (CQT) constraints in semiconductor wafer fabrication facilities (wafer fabs). Process engineers impose CQT constraints that require wafers to start a subsequent operation within a given time window after a certain operation is completed to prevent native oxidation and contamination effects on the wafer surface. We equip dataset 2 of the SMT2020 testbed with production control logic to avoid CQT constraint violations. Therefore, two different CQT-aware dispatching rules and a combination of a lot stopping strategy with these rules are proposed. The effect of the production control strategies is investigated by means of a simulation study. We show that the number of CQT violations can be reduced without large deteriorations of global performance measures such as cycle time and throughput. |
Year | DOI | Venue |
|---|---|---|
2020 | 10.5555/3466184.3466388 | Winter Simulation Conference |
DocType | Citations | PageRank |
Conference | 0 | 0.34 |
References | Authors | |
0 | 4 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Denny Kopp | 1 | 0 | 1.35 |
| Michael Hassoun | 2 | 0 | 0.34 |
| Adar Kalir | 3 | 0 | 0.34 |
| Lars Mönch | 4 | 0 | 1.69 |