Title
Pursuing The Diffraction Limit With Nano-Led Scanning Transmission Optical Microscopy
Abstract
Recent research into miniaturized illumination sources has prompted the development of alternative microscopy techniques. Although they are still being explored, emerging nano-light-emitting-diode (nano-LED) technologies show promise in approaching the optical resolution limit in a more feasible manner. This work presents the exploration of their capabilities with two different prototypes. In the first version, a resolution of less than 1 mu m was shown thanks to a prototype based on an optically downscaled LED using an LED scanning transmission optical microscopy (STOM) technique. This research demonstrates how this technique can be used to improve STOM images by oversampling the acquisition. The second STOM-based microscope was fabricated with a 200 nm GaN LED. This demonstrates the possibilities for the miniaturization of on-chip-based microscopes.
Year
DOI
Venue
2021
10.3390/s21103305
SENSORS
Keywords
DocType
Volume
CMOS sensor, nano-LED, optical downscaling, nanopositioners, miniaturization
Journal
21
Issue
ISSN
Citations 
10
1424-8220
0
PageRank 
References 
Authors
0.34
0
15