Name
Abstract | ||
|---|---|---|
Based on the proposed MEMS triangular capacitors previously, we performed a further investigation on the stiffness tuning characteristics of a spring-softening triangular capacitor including the fringe effect and effective stiffness nonlinearity and the effects on the performance of a MEMS accelerometer. Both the numerical and experimental results demonstrate a linear yet reduced stiffness tuning ... |
Year | DOI | Venue |
|---|---|---|
2021 | 10.1109/NEMS51815.2021.9451413 | 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
Keywords | DocType | ISSN |
Micromechanical devices,Accelerometers,Sensitivity,Nanoelectromechanical systems,Capacitors,Linearity,Numerical models | Conference | 2474-3747 |
ISBN | Citations | PageRank |
978-1-6654-1941-3 | 0 | 0.34 |
References | Authors | |
0 | 6 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Yiming Jin | 1 | 0 | 0.34 |
| Zhipeng Ma | 2 | 0 | 0.34 |
| Yixuan Guo | 3 | 0 | 0.34 |
| Tengfei Zhang | 4 | 0 | 0.34 |
| Xudong Zheng | 5 | 0 | 0.34 |
| Zhonghe Jin | 6 | 0 | 0.34 |