Paper Info
Title
Internal Resonant Oscillation In Coupled Resonators For High-Resolution Mass Sensing With A Wider Coupling Range
Abstract
This paper, mainly reports a coupled cantilever structure applicable to mass or gas sensing applications with a higher resolution in a wider coupling range. Based on the coupled cantilevers with different rectangle geometry, we design a p-shaped coupled cantilever structure with triple frequency ratio, which provides mass or gas sensing with larger adsorption area. In the present work, internal resonance characteristics of the proposed structure are studied with different mass perturbations, and the coupling tongue characteristics with respect to the coupling range are further evaluated. Compared to that of the rectangular coupled cantilevers, on the one hand, a wider coupling range under the same applied voltage can be obtained, while on the other hand, a higher proportion of the third harmonic indicates a better resolution. The above preliminarily reveals the potential superiority of the internal resonant oscillation observed in the proposed the p-shaped coupled cantilever structure when applied to mass or gas sensing.
Year
DOI
Venue
2021
10.1109/NEMS51815.2021.9451464
2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)
Keywords
DocType
ISSN
internal resonant oscillation, p-shaped coupled cantilever structure, mass perturbation, coupling range, resolution, mass or gas sensing applications
Conference
2474-3747
Citations 
PageRank 
References 
0
0.34
0
Authors
5
Name
Order
Citations
PageRank
Nanxing Li100.34
Cao Xia200.34
Guowen Zheng300.34
Xu Du43715.92
Dong F. Wang500.34