Name
Title | ||
|---|---|---|
A Micro Machined Electrochemical Angular Accelerometer Based On Lnterdigital Electrodes |
Abstract | ||
|---|---|---|
This study proposes a micromachined electrochemical angular accelerometer based on interdigital electrodes, with the ability to measure low-frequency angular acceleration. In this paper, the design, fabrication, and characterization of the angular accelerometer were included, with a sensitivity of 100 V/(rad/s(2)) at 0.01Hz. Compared with commercial sensors, the micro sensor presented in this study has the characteristics of a simple electrode structure and manufacturing process, which may provide a new perspective for mass fabrication and further used in seismic monitoring. |
Year | DOI | Venue |
|---|---|---|
2021 | 10.1109/NEMS51815.2021.9451444 | 2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) |
DocType | ISSN | Citations |
Conference | 2474-3747 | 0 |
PageRank | References | Authors |
0.34 | 0 | 11 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Tian Liang | 1 | 0 | 0.34 |
| Junbo Wang | 2 | 54 | 16.41 |
| Deyong Chen | 3 | 0 | 0.34 |
| Jian Chen | 4 | 23 | 15.42 |
| Bowen Liu | 5 | 0 | 0.34 |
| Chao Xu | 6 | 0 | 0.34 |
| Wenjie Qi | 7 | 0 | 0.34 |
| Xu She | 8 | 0 | 0.34 |
| Mingwei Chen | 9 | 0 | 0.34 |
| Anxiang Zhong | 10 | 0 | 0.34 |
| Yumo Duan | 11 | 0 | 0.34 |