Title
Diffractive Sensor Elements For Registration Of Long-Term Instability At Writing Of Computer-Generated Holograms
Abstract
The research and development of methods using of the specialized diffractive microstructure sensors embedded in the pattern of computer-generated holograms (CGH) manufactured on circular and X-Y laser writing systems is discussed. These microstructures consist of two parts: one of which is written before the CGH in the field of future hologram and the second one is written during the long-term writing of the CGH. The shift between the first and second part of the microstructure is the trace of the writing errors and allows one to determine and calculate the error of CGH fabrication along both orthogonal coordinates. The developed method is based on the principle of diffraction-based overlay with 1D and 2D built-in diffractive microstructure-sensors. Mathematical modeling and results of experimental test writings of such diffractive microstructure sensors are described. The efficiency of using these types of build-in sensors for the writing errors estimation for CGHs is demonstrated.</p>
Year
DOI
Venue
2021
10.3390/s21196635
SENSORS
Keywords
DocType
Volume
diffractive microstructure sensors, diffraction-based overlay, computer-generated holograms, laser writing systems, asphere testing, computer-generated holograms certification
Journal
21
Issue
ISSN
Citations 
19
1424-8220
0
PageRank 
References 
Authors
0.34
0
4
Name
Order
Citations
PageRank
Ruslan V Shimansky100.34
Dmitrij A Belousov200.34
Victor P. Korolkov300.68
Roman I Kuts400.34