Title
Strained Ge Channels with High Hole Mobility Grown on Si Substrates by Molecular Beam Epitaxy
Abstract
Strained modulation-doped quantum wells (QW) offer a huge potential for semiconductor device applications due to their high mobility. The material Ge is particularly interesting here, exhibiting the highest bulk hole-mobility of all known semiconductors. However, the growth for Ge QW structures is quite complex and a special virtual substrate (VS) technique is needed. The VS is commonly grown with...
Year
DOI
Venue
2021
10.23919/MIPRO52101.2021.9597145
2021 44th International Convention on Information, Communication and Electronic Technology (MIPRO)
Keywords
DocType
ISBN
Buffer layers,Temperature measurement,Temperature,Semiconductor devices,Molecular beam epitaxial growth,Doping,Germanium
Conference
978-953-233-101-1
Citations 
PageRank 
References 
0
0.34
0
Authors
7
Name
Order
Citations
PageRank
E. Sigle100.34
D. Weißhaupt200.34
Michael Oehme323.95
H. S. Funk400.34
udo d schwarz532.29
F. Berkmann600.34
J. Schulze724.97