Name
Abstract | ||
|---|---|---|
Controlling the operations and resolving product performance issues in today's high-tech production systems, such as semiconductor fabs, becomes a cumbersome task, even for experienced field engineers. To address the pressing need for assisted diagnostics approaches, in this paper we propose a model-based step-wise methodology, based on domain-specific languages and Bayesian networks, to capture domain knowledge and allow automated and guided reasoning in complex end-to-end diagnostics flow. We illustrate the methodology components and show its applied strength in a real industrial setting of semiconductor production chains. |
Year | DOI | Venue |
|---|---|---|
2019 | 10.1109/ICSRS48664.2019.8987704 | 2019 4th International Conference on System Reliability and Safety (ICSRS) |
Keywords | DocType | ISBN |
knowledge based diagnostics,domain-specific language,model-driven engineering,probabilistic reasoning,Bayesian network | Conference | 978-1-7281-4782-6 |
Citations | PageRank | References |
0 | 0.34 | 3 |
Authors | ||
5 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Marina Velikova | 1 | 0 | 0.34 |
| Carmen Bratosin | 2 | 0 | 0.34 |
| Alexander Ypma | 3 | 0 | 0.34 |
| Vera Lemmen | 4 | 0 | 0.34 |
| Robert Jan Van Wijk | 5 | 0 | 0.34 |