Name
Title | ||
|---|---|---|
Crossing Frequency Method Applicable to Intermediate Pressure Plasma Diagnostics Using the Cutoff Probe |
Abstract | ||
|---|---|---|
Although the recently developed cutoff probe is a promising tool to precisely infer plasma electron density by measuring the cutoff frequency (f(cutoff)) in the S21 spectrum, it is currently only applicable to low-pressure plasma diagnostics below several torr. To improve the cutoff probe, this paper proposes a novel method to measure the crossing frequency (f(cross)), which is applicable to high-pressure plasma diagnostics where the conventional f(cutoff) method does not operate. Here, f(cross) is the frequency where the S21 spectra in vacuum and plasma conditions cross each other. This paper demonstrates the f(cross) method through three-dimensional electromagnetic wave simulation as well as experiments in a capacitively coupled plasma source. Results demonstrate that the method operates well at high pressure (several tens of torr) as well as low pressure. In addition, through circuit model analysis, a method to estimate electron density from f(cross) is discussed. It is believed that the proposed method expands the operating range of the cutoff probe and thus contributes to its further development. |
Year | DOI | Venue |
|---|---|---|
2022 | 10.3390/s22031291 | SENSORS |
Keywords | DocType | Volume |
plasma diagnostics, electron density measurement, cutoff probe, high-pressure plasma, crossing frequency method | Journal | 22 |
Issue | ISSN | Citations |
3 | 1424-8220 | 0 |
PageRank | References | Authors |
0.34 | 0 | 5 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Si-Jun Kim | 1 | 0 | 0.34 |
| Jang-Jae Lee | 2 | 0 | 0.34 |
| Young-Seok Lee | 3 | 0 | 1.01 |
| Chul-Hee Cho | 4 | 0 | 1.01 |
| Shin-Jae You | 5 | 0 | 1.01 |