Title
Demonstration of SWIR Silicon-Based Photodetection by Using Thin ITO/Au/Au Nanoparticles/n-Si Structure
Abstract
Plasmonic photodetection based on the hot-electron generation in nanostructures is a promising strategy for sub-band detection due to the high conversion efficiencies; however, it is plagued with the high dark current. In this paper, we have demonstrated the plasmonic photodetection with dark current suppression to create a Si-based broadband photodetector with enhanced performance in the short-wavelength infrared (SWIR) region. By hybridizing a 3 nm Au layer with the spherical Au nanoparticles (NPs) formed by rapid thermal annealing (RTA) on Si substrate, a well-behaved ITO/Au/Au NPs/n-Si Schottky photodetector with suppressed dark current and enhanced absorption in the SWIR region is obtained. This optimized detector shows a broad detection beyond 1200 nm and a high responsivity of 22.82 mA/W at 1310 nm at -1 V, as well as a low dark current density on the order of 10(-5) A/cm(2). Such a Si-based plasmon-enhanced detector with desirable performance in dark current will be a promising strategy for realization of the high SNR detector while keeping fabrication costs low.
Year
DOI
Venue
2022
10.3390/s22124536
SENSORS
Keywords
DocType
Volume
Au nanoparticle, dark current suppression, enhanced absorption, SWIR, photodetectors
Journal
22
Issue
ISSN
Citations 
12
1424-8220
0
PageRank 
References 
Authors
0.34
0
8
Name
Order
Citations
PageRank
Xinxin Li13111.80
Zhen Deng200.34
Ziguang Ma300.34
Yang Jiang400.68
Chunhua Du500.34
Haiqiang Jia600.68
Wenxin Wang700.34
Chen Hong82111.66