Title
Unsupervised novelty pattern classification of shmoo plots for visualizing the test results of integrated circuits
Abstract
•Shmoo plots in semiconductor manufacturing are used for indicating device state.•We address high-dimensional and multiclass imbalance challenges for shmoo plots.•We introduce a feature extraction process for presenting clear shmoo plot patterns.•We propose a two-stage clustering process to solve multiclass imbalance situations.•To demonstrate the applicability of the proposed model, real field data is used.
Year
DOI
Venue
2022
10.1016/j.eswa.2022.117341
Expert Systems with Applications
Keywords
DocType
Volume
Shmoo plot,Class imbalance,High dimensionality,Unlabeled data,Feature extraction,Clustering
Journal
202
ISSN
Citations 
PageRank 
0957-4174
0
0.34
References 
Authors
0
4
Name
Order
Citations
PageRank
Hyun Soo Shin100.34
Youngju Kim200.34
Chang Ouk Kim300.34
Sung Ho Park411.70