Name
Title | ||
|---|---|---|
Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics |
Abstract | ||
|---|---|---|
As the importance of measuring electron density has become more significant in the material fabrication industry, various related plasma monitoring tools have been introduced. In this paper, the development of a microwave probe, called the measurement of lateral electron density (MOLE) probe, is reported. The basic properties of the MOLE probe are analyzed via three-dimensional electromagnetic wave simulation, with simulation results showing that the probe estimates electron density by measuring the surface wave resonance frequency from the reflection microwave frequency spectrum (S-11). Furthermore, an experimental demonstration on a chamber wall measuring lateral electron density is conducted by comparing the developed probe with the cutoff probe, a precise electron density measurement tool. Based on both simulation and experiment results, the MOLE probe is shown to be a useful instrument to monitor lateral electron density. |
Year | DOI | Venue |
|---|---|---|
2022 | 10.3390/s22155487 | SENSORS |
Keywords | DocType | Volume |
plasma diagnostics, non-invasive electron density measurement, planar microwave probes, plasma monitoring | Journal | 22 |
Issue | ISSN | Citations |
15 | 1424-8220 | 0 |
PageRank | References | Authors |
0.34 | 0 | 8 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Si-Jun Kim | 1 | 0 | 0.68 |
| Sang-Ho Lee | 2 | 0 | 1.35 |
| Ye-Bin You | 3 | 0 | 0.68 |
| Young-Seok Lee | 4 | 0 | 1.01 |
| In-Ho Seong | 5 | 0 | 0.68 |
| Chul-Hee Cho | 6 | 0 | 1.01 |
| Jang-Jae Lee | 7 | 0 | 0.68 |
| Shin-Jae You | 8 | 0 | 1.01 |