Name
Abstract | ||
|---|---|---|
The receive sensitivity of lead zirconate titanate (PZT) piezoelectric micromachined ultrasound transducers (PMUTs) was improved by applying a DC bias during operation. The PMUT receive sensitivity is governed by the voltage piezoelectric coefficient, h(31,f). With applied DC biases (up to 15 V) on a 2 mu m PbZr0.52Ti0.48O3 film, e(31,f) increased 1.6 times, permittivity decreased by a factor of 0.6, and the voltage coefficient increased by similar to 2.5 times. For released PMUT devices, the ultrasound receive sensitivity improved by 2.5 times and the photoacoustic signal improved 1.9 times with 15 V applied DC bias. B-mode photoacoustic imaging experiments showed that with DC bias, the PMUT received clearer photoacoustic signals from pencil leads at 4.3 cm, compared to 3.7 cm without DC bias. |
Year | DOI | Venue |
|---|---|---|
2022 | 10.3390/s22155614 | SENSORS |
Keywords | DocType | Volume |
PMUT, photoacoustics, receive sensitivity, DC bias | Journal | 22 |
Issue | ISSN | Citations |
15 | 1424-8220 | 0 |
PageRank | References | Authors |
0.34 | 0 | 7 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Christopher Cheng | 1 | 0 | 0.34 |
| Travis Peters | 2 | 0 | 0.34 |
| Ajay Dangi | 3 | 0 | 0.68 |
| Sumit Agrawal | 4 | 0 | 0.34 |
| Haoyang Chen | 5 | 0 | 0.34 |
| Sri-Rajasekhar Kothapalli | 6 | 10 | 3.78 |
| Susan Trolier-McKinstry | 7 | 14 | 1.41 |