Title
An Investigation of ESD-Enhancement by the Drain-side Embedded SCR Area Modulation for HV pLDMOSs
Abstract
In this paper, a method to improve the electrostatic discharge (ESD) ability of high-voltage P-channel laterally diffused MOSFET (pLDMOS) is proposed, that is, the use of drain-side parasitic silicon controlled rectifier (SCR) to change the N <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> area modulation. By using the transmission-line pulse (TLP) testing machine, it can be found from the snapback I-V curve, the trigger voltage (V <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t1</inf> ) will decrease proportionally from 79.3 V to 36.2 V. And the holding voltage (V <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">h</inf> ) significantly decreased from 79.3 V to 4.2 V. Due to the increase of the N <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> doping area, the characteristics of SCR will be obvious with the increase of the area. Meanwhile, the secondary breakdown current (It2) of 9 A will be compared to the reference device of 1.48 A. Therefore, this modulation technique is greatly improved the ESD immunity of high voltage pLDMOS.
Year
DOI
Venue
2022
10.1109/ICCE-Taiwan55306.2022.9869111
2022 IEEE International Conference on Consumer Electronics - Taiwan
Keywords
DocType
ISSN
ESD-enhancement,SCR area modulation,electrostatic discharge ability,high-voltage P-channel,laterally diffused MOSFET,drain-side parasitic silicon,rectifier,transmission-line pulse testing machine,TLP,snapback I-V curve,trigger voltage,holding voltage,doping area,modulation technique,ESD immunity,high voltage pLDMOS,current 9.0 A,current 1.48 A,voltage 36.2 V to 79.3 V,voltage 4.2 V to 79.3 V
Conference
2575-8276
ISBN
Citations 
PageRank 
978-1-6654-7051-3
0
0.34
References 
Authors
0
5
Name
Order
Citations
PageRank
Zhi–Wei Liu100.34
Shen–Li Chen200.34
Jhong–Yi Lai300.34
Xing–Chen Mai400.34
Yu–Jie Chung500.34