| Resonant properties of piezoelectric cantilever transducers fabricated on the SiC membrane. | 0 | 0.34 | 2011 |
| Optimization of functional layers in piezoelectric thick film MEMS process. | 0 | 0.34 | 2011 |
| A compact vertical scanner for atomic force microscopes. | 3 | 0.54 | 2010 |
