Title
Optimization of functional layers in piezoelectric thick film MEMS process.
Year
DOI
Venue
2011
10.1109/NEMS.2011.6017296
NEMS
Keywords
Field
DocType
cantilever,piezoelectric,mems
Substrate (chemistry),PMUT,Composite material,Microelectromechanical systems,Cantilever,Sintering,Materials science,Silicon,Fabrication,Piezoelectricity
Conference
Citations 
PageRank 
References 
0
0.34
0
Authors
4
Name
Order
Citations
PageRank
Dong-Yeon Lee1263.48
Jaesool Shim231.22
Tae Song Kim312.11
Jae Hong Park4192.98