Author Info
Name
Affiliation
Papers
HIRAKU MATSUKUMA
Tohoku Univ, Dept Finemech, Sendai, Miyagi 9808579, Japan
4
Collaborators
Citations 
PageRank 
11
0
1.35
Referers 
Referees 
References 
0
3
1
Title
Citations
PageRank
Year
A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer00.342021
Fabrication Of A Two-Dimensional Diffraction Grating With Isolated Photoresist Pattern Structures00.342020
Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors00.342019
A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions.00.342018