Paper Info
Title
A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer
Abstract
An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric self-calibration method was proposed to assess the pitch deviation of the scale grating by combing the first-order diffracted beams from the grating, a stitching calibration method is proposed to enlarge the measurement range. Theoretical analysis is performed to realize the X-directional pitch deviation calibration of the long-range linear scale while reducing the second-order accumulation effect by canceling the influence of the reference flat error in the sub-apertures' measurements. In this paper, the stitching interferometry theory is briefly reviewed, and theoretical equations of the X-directional pitch deviation stitching are derived for evaluation of the pitch deviation of the long-range linear scale. Followed by the simulation verification, some experiments with a linear scale of 105 mm length from a commercial interferential scanning-type optical encoder are conducted to verify the feasibility of the self-calibration stitching method for the calibration of the X-directional pitch deviation of the linear scale over its whole area.
Year
DOI
Venue
2021
10.3390/s21217412
SENSORS
Keywords
DocType
Volume
optical encoder, linear scale, pitch deviation, stitching interferometry, self-calibration
Journal
21
Issue
ISSN
Citations 
21
1424-8220
0
PageRank 
References 
Authors
0.34
0
4
Name
Order
Citations
PageRank
Xin Xiong121.74
Yuki Shimizu2116.91
Hiraku Matsukuma301.35
Wei Gao4263.61