A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope With Off-Plane Coupling Suppression Silicon Gratings | 0 | 0.34 | 2022 |
A Silicon Resonant Accelerometer with Vibrating Beam Integrated with Comb Fingers Sensing Structure | 0 | 0.34 | 2019 |
A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness | 0 | 0.34 | 2018 |
An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control. | 1 | 0.35 | 2017 |
A temperature control system used for improving resonant frequency drift of MEMS gyroscopes | 0 | 0.34 | 2015 |
A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer | 0 | 0.34 | 2015 |
A novel scale factor calibration method for a MEMS gyroscope based on virtual coriolis force | 0 | 0.34 | 2015 |
Research on the resonant frequency of MEMS gyroscopes under varying tuning voltage | 0 | 0.34 | 2015 |
Investigation of reliability of MEMS gyroscopes under different shock conditions. | 0 | 0.34 | 2015 |
A research of the bandwidth of a mode-matching MEMS vibratory gyroscope | 0 | 0.34 | 2012 |
A novel acceleration switch with hat-like contact separated from proof mass | 0 | 0.34 | 2011 |