Author Info
Name
Affiliation
Papers
DAYU TIAN
Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
1
Collaborators
Citations 
PageRank 
6
0
0.34
Referers 
Referees 
References 
0
0
0
Title
Citations
PageRank
Year
A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer00.342015