Title
A Green function-based parasitic extraction method for inhomogeneous substrate layers
Abstract
This paper presents a new Green function-based approach for substrate parasitic extraction in substrates with inhomogeneous layers. This new formulation allows analysis of noise coupling with sinkers, trenches and wells, - a limitation in prior Green function-based extractors. Numerical examples for sinkers and trenches are provided and compared with the results from 3D semiconductor device simulations. It is shown that the proposed method is accurate and computationally efficient.
Year
DOI
Venue
2005
10.1109/DAC.2005.193788
DAC
Keywords
Field
DocType
green function-based parasitic extraction,semiconductor device models,inhomogeneous substrate layer,integrated circuit modelling,substrate parasitic extraction method,circuit analysis computing,inhomogeneous layer,green function methods,new green,bicmos integrated circuits,green's function methods,prior green,function-based extractor,integrated circuit noise,function-based approach,green function-based extractors,inhomogeneous substrate layers,numerical example,noise coupling,substrate parasitic extraction,new formulation,parasitic extraction,conductivity,green function,finite element methods,finite difference methods
Substrate (chemistry),Green's function,Coupling,Computer science,Circuit noise,Electronic engineering,Finite element method,Finite difference method,Semiconductor device,Parasitic extraction
Conference
ISSN
ISBN
Citations 
0738-100X
1-59593-058-2
1
PageRank 
References 
Authors
0.37
7
4
Name
Order
Citations
PageRank
Chenggang Xu1154.34
Ranjit Gharpurey221032.68
Terri S. Fiez316747.25
Kartikeya Mayaram434958.50