Name
Abstract | ||
|---|---|---|
Pick-place of single nanowires inside scanning electron microscopes (SEM) is useful for prototyping functional devices and characterizing nanowires's properties. Nanowire pick-place has been typically performed via teleoperation, which is time-consuming and highly skill-dependent. This paper presents an automated approach to the pick-place of single nanowires. Through SEM visual detection and vision-based motion control, the system automatically transferred individual silicon nanowires from their growth substrate to a microelectromechanical systems (MEMS) device that characterized the nanowires's electromechanical properties. The performance of the nanorobotic pick-up and placement procedures was experimentally quantified. |
Year | DOI | Venue |
|---|---|---|
2013 | 10.1109/TASE.2013.2244082 | IEEE T. Automation Science and Engineering |
Keywords | Field | DocType |
Nanowires,Probes,Micromechanical devices,Substrates,Scanning electron microscopy,Image edge detection,Visualization | Teleoperation,Motion control,Robot vision,Microelectromechanical systems,Computer science,Scanning electron microscope,Control engineering,Electronic engineering,Placement procedures,Optoelectronics,Nanowire,Silicon nanowires | Journal |
Volume | Issue | ISSN |
10 | 3 | 1545-5955 |
Citations | PageRank | References |
0 | 0.34 | 5 |
Authors | ||
6 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Xutao Ye | 1 | 3 | 1.16 |
| Yong Zhang | 2 | 63 | 9.90 |
| Changhai Ru | 3 | 38 | 10.24 |
| Jun Luo | 4 | 98 | 25.37 |
| Shaorong Xie | 5 | 112 | 38.53 |
| Yu Sun | 6 | 418 | 69.89 |