Name
Abstract | ||
|---|---|---|
Recurring defect cluster patterns on semiconductor wafers can be linked to imperfectness/faults in specific manufacturing processes or alternatively - to failure or malfunctioning of production equipment (in our research we assume that defects associated with deficiencies/errors in the circuit design are not present). By identifying these patterns as they occur, a fast and effective process monitoring and control mechanism can be achieved, shortening the time-to-yield period and reducing the loss in revenue due to avoidable yield drop. Identifying these patterns manually could be a too complex and time consuming task. This research presents an automatic yield management system to extract and identify defect clusters as well as perform yield analysis in a high-volume semiconductor devise manufacturing. |
Year | DOI | Venue |
|---|---|---|
2011 | 10.1109/DELTA.2011.53 | DELTA |
Keywords | Field | DocType |
high-volume semiconductor,recurring defect cluster pattern,semiconductor production test,control mechanism,defect cluster,yield analysis,semiconductor wafer,automatic yield management system,specific manufacturing process,yield drop,circuit design,integrated circuits,production,productivity,feature extraction,classification algorithms,yield management,process control,management system,failure analysis,manufacturing | Monitoring and control,Computer science,Yield management,Circuit design,Classification tree analysis,Process control,Statistical classification,Integrated circuit,Semiconductor,Reliability engineering | Conference |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
6 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Huiyuan Cheng | 1 | 0 | 0.68 |
| Melanie Po-Leen Ooi | 2 | 70 | 18.35 |
| Ye Chow Kuang | 3 | 72 | 19.81 |
| Eric Sim | 4 | 0 | 0.34 |
| Bryan Cheah | 5 | 0 | 0.34 |
| Serge Demidenko | 6 | 47 | 7.78 |