Title
Semiconductor manufacturing scheduling: maximizing delivery performance in semiconductor wafer fabrication facilities
Abstract
This paper is motivated by the problem of scheduling customer orders (jobs) in a semiconductor fabrication facility ("wafer fab") to maximize delivery performance when the jobs have non-identical priorities (weights). As each job is typically assigned a weight based on its size, value, and/or requesting customer, a wafer fab's delivery performance can be evaluated in terms of minimizing the sum of each job's weighted tardiness. A heuristic has been proposed for obtaining "good" solutions to this complex problem. Using a "real world" wafer fab data model, the heuristic is compared to a number of dispatching rules in terms of how well each method produces job sequences that maximize delivery performance of customer orders. Results suggest that the heuristic consistently produces the best overall schedules, but there is a price to be paid in terms of solution speed.
Year
DOI
Venue
2000
10.1145/510378.510592
Winter Simulation Conference
Keywords
Field
DocType
semiconductor manufacturing scheduling,wafer fab,customer order,delivery performance,real world,wafer fab data model,overall schedule,non-identical priority,semiconductor fabrication facility,semiconductor wafer fabrication facility,complex problem,job sequence
Heuristic,Tardiness,Delivery Performance,Industrial engineering,Scheduling (computing),Computer science,Semiconductor device fabrication,Wafer fabrication,Schedule,Data model
Conference
ISBN
Citations 
PageRank 
0-7803-6582-8
0
0.34
References 
Authors
0
2
Name
Order
Citations
PageRank
Scott J. Mason155573.37
John W. Fowler21185129.85