Title
A Novel Test Methodology for MEMS Magnetic Micromotors
Abstract
This paper describes a novel test methodology for testing MEMS magnetic micromotor. A fault simulation model has been developed for the micromotor. The test apparatus consists of a low frequency sinusoidal source and a resonator that is tuned to the normal operating frequency of the micromotor. The test method described in this paper is used to detect complete open and near-open defects in the stator coils of the micromotor.
Year
DOI
Venue
1999
10.1109/VTEST.1999.766677
VTS
Keywords
Field
DocType
mems magnetic micromotors,normal operating frequency,novel test methodology,mems magnetic micromotor,test method,fault simulation model,low frequency sinusoidal source,test apparatus,near-open defect,stator coil,test methods,resonator,si,low frequency,normal operator,test methodology,silicon,conductors,micromagnetics,magnetic flux,testing
Test method,Low frequency,Microelectromechanical systems,Computer science,Resonator,Electrical conductor,Electronic engineering,Stator,Magnetic flux,Micromagnetics
Conference
ISSN
ISBN
Citations 
1093-0167
0-7695-0146-X
1
PageRank 
References 
Authors
0.36
0
2
Name
Order
Citations
PageRank
Bruce C. Kim18921.11
Krishna Marella210.36