Title
ESD Susceptibility of Submicron Air Gaps
Abstract
This work describes the investigation of the ESD susceptibility of submicron air gaps which are used e.g. in filter devices. The breakdown behaviour of the air gaps is analyzed in both the HBM (Human Body Model) time domain and the CDM (Charged Device Model) time domain. Transmission Line pulsing (TLP) reproduces the different failure signatures. Furthermore, the failure model itself is explained in detail.
Year
DOI
Venue
2006
10.1016/j.microrel.2006.07.039
Microelectronics Reliability
Keywords
Field
DocType
time domain
Engineering physics,Time domain,Human-body model,Transmission line,Electrostatic discharge,Electronic engineering,Air gap (plumbing),Engineering,Electrical engineering,Charged-device model
Journal
Volume
Issue
ISSN
46
9
0026-2714
Citations 
PageRank 
References 
0
0.34
1
Authors
4
Name
Order
Citations
PageRank
Heinrich Wolf131.35
Horst Gieser2103.34
Detlef Bonfert300.68
Markus Hauser400.34