Title
The impact of static and dynamic degradation on SOI “smart-cut” floating body MOSFETs
Abstract
The impact of static (DC) and dynamic (AC) degradation on SOI “smart-cut” floating body MOSFETs, was investigated by means of deep level transient spectroscopy (DLTS). The study was based on drain current signal recording, immediately after the transistor transition from OFF- to ON-state. In order to isolate the activity of capture/emission carrier mechanisms, undesirable parasitic effects such as drain current overshoot were suppressed by appropriately biasing the transistor substrates. Under DC degradation regime, DLTS spectra disclosed that carrier capture/emission process occurred through discrete traps governed by thermally activated mechanisms. Furthermore, polarization phenomena emerged. Under AC degradation regime, although the existence of interface states in Si-SiO2 interface was dominant, the revelation of shallow traps in low temperature domain was also monitored.
Year
DOI
Venue
2005
10.1016/j.microrel.2005.07.027
Microelectronics Reliability
Field
DocType
Volume
Silicon on insulator,Deep-level transient spectroscopy,Overshoot (signal),Degradation (geology),Electronic engineering,Engineering,MOSFET,Transistor,Ion implantation,Biasing
Journal
45
Issue
ISSN
Citations 
9
0026-2714
0
PageRank 
References 
Authors
0.34
2
4
Name
Order
Citations
PageRank
M.A. Exarchos121.54
G.J. Papaioannou2148.35
J. Jomaah363.32
F. Balestra400.34