Name
Title | ||
|---|---|---|
An Electrothermal Actuator With Two Degrees of Freedom Serving as the Arm of a MEMS Gripper |
Abstract | ||
|---|---|---|
In this paper, we present an electrothermal actuator with two degrees of freedom that can achieve independent in-plane and out-of-plane motions. The device is fabricated with the MetalMUMPs, which offers silicon nitride, polysilicon, and nickel as the major structural materials. The electrothermal actuator achieves large movement. The in-plane tip displacement is 82 μm at 0.039 W. The out-of-plane swing of the tip is 18 μm as the applied voltage varies from 0 to 90 V (0 to 0.36 W) and vice versa. A versatile microelectromechanical systems gripper that is capable of 2-D manipulation can be constructed with two such actuators, each of which serves as the gripper arm. |
Year | DOI | Venue |
|---|---|---|
2014 | 10.1109/TIE.2013.2293693 | IEEE Transactions on Industrial Electronics |
Keywords | Field | DocType |
power 0 w to 0.36 w,electrothermal actuator,voltage 0 v to 90 v,microelectromechanical systems gripper,2d manipulation,degrees of freedom,nickel,out-of-plane,silicon nitride,in-plane motion,mems gripper,polysilicon,gripper arm,structural materials,in-plane,grippers,metalmump,microelectromechanical systems (mems) gripper,microactuators,out-of-plane motion,size 82 mum,in-plane tip displacement | Electrothermal actuator,Microelectromechanical systems,Voltage,Control engineering,Engineering,Versa,Grippers,Silicon nitride,Swing,Actuator | Journal |
Volume | Issue | ISSN |
61 | 10 | 0278-0046 |
Citations | PageRank | References |
4 | 0.53 | 8 |
Authors | ||
7 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Dian-Sheng Chen | 1 | 34 | 11.70 |
| Po-Fan Yeh | 2 | 4 | 0.53 |
| Yu-Fan Chen | 3 | 26 | 5.00 |
| Chun-Wei Tsai | 4 | 759 | 62.10 |
| Chun-Yi Yin | 5 | 4 | 0.53 |
| Ren-Jie Lai | 6 | 28 | 2.51 |
| Jui-che Tsai | 7 | 20 | 3.53 |