Paper Info
Title
A comparison study of the logic of four wafer fabrication simulators
Abstract
Many semiconductor manufacturing companies use one of the following four simulators to aid in analyzing, planning, and operating their manufacturing facilities: Tyecin Systems' ManSim/X, AutoSimulations' AutoSched, Systems Modeling's Wafer Fabrication Template, or Chance Industrial Solution's Delphi, which Wright, Williams, and Kelly now licenses as Factory Explorer. A benchmark study of the four packages was conducted, using actual factory data. The packages each produce different results between replications of the data, due to the data's stochastic nature. The differences which exist between the simulation packages studied in this paper, along with the modeling assumptions required to model the data, caused differences in the experimental output metrics of interest: product cycle time and tool utilization parameters. Some possible reasons are each simulation package's batching logic, setup avoidance rules, and rework occurrence estimators.
Year
DOI
Venue
1996
10.1145/256562.256896
Winter Simulation Conference
Keywords
Field
DocType
simulation package,batching logic,tyecin systems,systems modeling,semiconductor manufacturing company,wafer fabrication simulator,factory explorer,actual factory data,comparison study,chance industrial solution,wafer fabrication template,manufacturing facility,manufacturing industries,system modeling,textile industry,semiconductor manufacturing,semiconductor device modeling,fabrication,product cycle,logic
Rework,Factory,Industrial engineering,Process development execution system,Semiconductor device modeling,Computer science,Wafer fabrication,Integrated Computer-Aided Manufacturing,Semiconductor device fabrication,Systems modeling
Conference
ISBN
Citations 
PageRank 
0-7803-3383-7
3
1.25
References 
Authors
0
3
Name
Order
Citations
PageRank
Scott J. Mason155573.37
Paul A. Jensen2627.55
John W. Fowler31185129.85