Name
Abstract | ||
|---|---|---|
We examine a scheduling problem of a wet station with multiple job flows. The wet station performs cleaning processes for removing residual contaminants after wafer fabrication processes. It consists of several chemical and rinse baths, and multiple transport robots. Most studies on scheduling robotized systems including a wet station assume identical jobs and deal with cyclic scheduling that repeats a predefined work cycle. However, jobs arrive dynamically and many different jobs are processed concurrently at a wet station. We therefore examine a non-cyclic scheduling problem of the wet station to minimize the makespan. We first develop a Petri net model and solve the problem using a branch and bound (B&B) algorithm. We also propose a dynamic branching method and evaluate a lower bound based on a bottleneck process. During searching the nodes, we analyze deadlocks and add places to the Petri net model for precedence relations among the robot tasks by applying the deadlock prevention conditions. We finally show that the proposed B&B algorithm is sufficient to solve practical problems. |
Year | DOI | Venue |
|---|---|---|
2012 | 10.1109/ICSMC.2012.6378049 | SMC |
Keywords | Field | DocType |
job flow scheduling,scheduling,petri nets,tree searching,branch and bound algorithm,bottleneck process,petri net model,dynamic branching method,semiconductor technology,residual contaminant removal,wet station scheduling,deadlock analysis,wafer fabrication process,petri net,robot task,noncyclic scheduling problem,industrial robots,makespan minimization,precedence relation,lower bound,branch-and-bound algorithm,robotized system,minimisation,wet station,semiconductor industry,robots,availability,job shop scheduling | Bottleneck,Branch and bound,Petri net,Job shop scheduling,Scheduling (computing),Computer science,Wafer fabrication,Deadlock,Deadlock prevention algorithms,Distributed computing | Conference |
ISSN | ISBN | Citations |
1062-922X | 978-1-4673-1712-2 | 1 |
PageRank | References | Authors |
0.35 | 12 | 3 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Hyun-Jung Kim | 1 | 44 | 2.37 |
| Jun-Ho Lee | 2 | 224 | 21.56 |
| Tae-Eog Lee | 3 | 285 | 30.02 |