Feedback Control of Cluster Tools: Stability Against Random Time Disruptions | 0 | 0.34 | 2022 |
Wafer Delay Analysis And Control Of Dual-Armed Cluster Tools With Chamber Cleaning Operations | 2 | 0.37 | 2020 |
Modeling, Simulation And Supervisory Control Of Semiconductor Manufacturing Cluster Tools With An Equipment Front-End Module | 0 | 0.34 | 2020 |
Scheduling Dual-Armed Cluster Tools With Chamber Cleaning Operations. | 1 | 0.35 | 2019 |
Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations. | 2 | 0.36 | 2018 |
Multi-Agent Reinforcement Learning Approach For Scheduling Cluster Tools With Condition Based Chamber Cleaning Operations | 0 | 0.34 | 2018 |
Characterizing the Worst-Case Wafer Delay in a Cluster Tool Operated in a $K$-Cyclic Schedule. | 0 | 0.34 | 2018 |
Optimal Scheduling For Sequentially Connected Cluster Tools With Dual-Armed Robots And A Single Input And Output Module | 4 | 0.41 | 2017 |
Characterizing Token Delays of Timed Event Graphs for K-Cyclic Schedules. | 0 | 0.34 | 2017 |
Feedback Control of Cluster Tools for Regulating Wafer Delays | 8 | 0.45 | 2016 |
Modeling, Analysis, and Scheduling of Cluster Tools With Two Independent Arms | 2 | 0.37 | 2016 |
Modeling and simulation-based analysis of effectiveness of tactical level chemical defense operations. | 0 | 0.34 | 2016 |
Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With Parallel Chambers | 2 | 0.37 | 2016 |
Schedulability Analysis for Noncyclic Operation of Time-Constrained Cluster Tools With Time Variation. | 2 | 0.37 | 2016 |
Analysis and control of wafer delays in a dual-armed cluster tool for a K-cyclic schedule | 0 | 0.34 | 2016 |
A Branch and Bound Algorithm for Cyclic Scheduling of Timed Petri Nets | 8 | 0.49 | 2015 |
Time-Feasible Reachability Tree for Noncyclic Scheduling of Timed Petri Nets | 6 | 0.44 | 2015 |
Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm | 18 | 0.66 | 2015 |
Agent Based Modelling Framework for Military Domain Specific Command and Control. | 0 | 0.34 | 2015 |
Agent-Based Simulation of Time to Decide: Military Commands and Time Delays | 2 | 0.42 | 2015 |
Non-Cyclic Scheduling of a Wet Station | 3 | 0.39 | 2014 |
Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types | 12 | 0.60 | 2014 |
Steady state analysis of timed event graphs with time window constraints. | 6 | 0.50 | 2014 |
New insights on river crossing operation using rafts by modeling and simulation (WIP) | 0 | 0.34 | 2014 |
Optimal scheduling of transient cycles for single-armed cluster tools | 6 | 0.58 | 2013 |
Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots. | 31 | 1.12 | 2013 |
Scheduling timed Petri nets with a time-feasible reachability tree | 1 | 0.35 | 2013 |
Cyclic Scheduling of Sequentially Connected Cluster Tools with a Single I/O Module. | 4 | 0.44 | 2013 |
Noncyclic Scheduling for Timed Discrete-Event Systems With Application to Single-Armed Cluster Tools Using Pareto-Optimal Optimization. | 17 | 0.72 | 2013 |
Two-stage lot scheduling with waiting time constraints and due dates. | 0 | 0.34 | 2013 |
Scheduling of Petri nets as a multi-objective shortest path problem | 2 | 0.37 | 2012 |
Scheduling transient periods of single-armed cluster tools | 1 | 0.39 | 2012 |
Scheduling a wet station using a branch and bound algorithm | 1 | 0.35 | 2012 |
A petri net-based modeling and scheduling with a branch and bound algorithm | 4 | 0.41 | 2012 |
Feedback control design for cluster tools with wafer residency time constraints | 3 | 0.38 | 2012 |
Scheduling of a dual-armed cluster tool with two independent robot arms | 2 | 0.36 | 2012 |
Scheduling of cluster tools with ready time constraints for small lot production | 5 | 0.61 | 2011 |
Cyclic scheduling of cluster tools with non-identical chamber access times | 0 | 0.34 | 2011 |
Concurrent processing of multiple wafer types in a single-armed cluster tool | 5 | 0.47 | 2011 |
An open scheduling architecture for cluster tools. | 5 | 0.57 | 2010 |
Schedulability Analysis of Time-Constrained Cluster Tools With Bounded Time Variation by an Extended Petri Net | 12 | 1.01 | 2008 |
Scheduling a multi-chip package assembly line with reentrant processes and unrelated parallel machines | 1 | 0.37 | 2008 |
A review of scheduling theory and methods for semiconductor manufacturing cluster tools | 39 | 1.81 | 2008 |
Efficient scheduling method based on an assignment model for robotized cluster tools | 5 | 0.62 | 2008 |
Optimal scheduling of dual-armed cluster tools without swap restriction | 16 | 0.95 | 2008 |
A Branch-and-price algorithm for placement routing for a multi-head beam-type component placement tool | 2 | 0.37 | 2008 |
Token delays and generalized workload balancing for timed event graphs with application to cluster tool operation | 2 | 0.38 | 2006 |
Stochastic cyclic flow lines with blocking: Markovian models | 3 | 0.39 | 2005 |
Cluster Tool Module Communication Based On A High-Level Fieldbus | 2 | 0.41 | 2004 |
SECAM: a supervisory equipment control application model for integrated semiconductor manufacturing equipment. | 2 | 0.71 | 2004 |