Paper Info
Title
Data-Driven Condition-Based Maintenance of Test Handlers in Semiconductor Manufacturing.
Abstract
To stay competitive, semiconductor manufacturers have come to acknowledge maintenance as an essential strategic element in manufacturing process planning. Condition-based maintenance (CBM) allows the maintenance strategy to be customised based on the equipment type and its failure pattern. Traditional CBM uses simple control charts, thus limiting its application to simple systems. This paper proposes the use of Data-driven CBM as a maintenance strategy for equipment in a semiconductor mass production environment.
Year
DOI
Venue
2011
10.1109/DELTA.2011.42
DELTA
Keywords
Field
DocType
condition-based maintenance,semiconductor manufacturer,essential strategic element,simple control chart,semiconductor mass production environment,traditional cbm,simple system,maintenance strategy,data-driven cbm,data-driven condition-based maintenance,equipment type,test handlers,semiconductor manufacturing,manufacturing,integrated circuits,strategic planning,control charts,maintenance engineering,mass production,failure analysis,control chart,reliability
Condition-based maintenance,Computer science,Semiconductor device fabrication,Manufacturing engineering,Proactive maintenance,Control chart,Condition monitoring,Predictive maintenance,Strategic planning,Reliability engineering,Maintenance engineering
Conference
Citations 
PageRank 
References 
0
0.34
3
Authors
6
Name
Order
Citations
PageRank
Timothy Guan100.34
Ye Chow Kuang27219.81
Melanie Po-Leen Ooi37018.35
Xiang Gin Cheah400.34
Yeung Shun Tan500.34
Serge Demidenko6477.78