Paper Info
Title
Impact of control plan design on tool risk management: a simulation study in semiconductor manufacturing
Abstract
In this paper, we analyze the impact of control plan design of defectivity inspections for tool risk management. Defectivity inspections are performed on products and can reveal the yield loss produced by contaminations or structural flaws. The risk considered in this paper concerns the exposure level of wafers on a tool between two defectivity controls. Our goal is to analyze how control plans can impact the manufacturing robustness from the point of view of wafer at risk on tools. A smart sampling strategy is considered for sampling lots to be measured. Actual data from the Rousset fab of STMicroelectronics are used. The simulation experiments are performed using the S5 Simulator developed by EMSE-CMP. Results show that not only the number and positions of controls operations have an important impact on tool risk management, but also how each control operation covers process operations.
Year
DOI
Venue
2011
10.1109/WSC.2011.6147905
Winter Simulation Conference
Keywords
Field
DocType
simulation study,control plan design,tool risk management,paper concern,control plan,semiconductor manufacturing,control operation,sampling lot,defectivity control,controls operation,defectivity inspection,important impact,semiconductor devices,simulation experiment,inspection,risk management,throughput,machine tools,sampling methods,process design,manufacturing,process control
Computer science,Semiconductor device fabrication,Robustness (computer science),Manufacturing engineering,Capacity planning,Risk management,Process design,Process control,Sampling (statistics),Reliability engineering,Machine tool
Conference
ISSN
ISBN
Citations 
0891-7736
978-1-4799-2077-8
3
PageRank 
References 
Authors
0.87
2
3
Name
Order
Citations
PageRank
Gloria Luz Rodriguez Verjan130.87
Stéphane Dauzére-Pérès272.86
Jacques Pinaton31912.98