Name
Title | ||
|---|---|---|
A mathematical model for estimating defect inspection capacity with a dynamic control strategy |
Abstract | ||
|---|---|---|
In this paper, we introduce a mathematical model for estimating the use of defect inspection capacity. Until recently, the selection of lots to be inspected was only done at the beginning of the manufacturing process. With the introduction of dynamic controls on production tools, the selection of lots to be inspected is done according to the production state. Our problem focuses on the Wafer at Risk (W@R) on process tools. The W@R is the number of processed wafers between two control operations. The W@R depends on several factors such as the availability of measurable products, control limits, defect inspection capacity and defect inspection control plans of products. Our model aims at calculating the defect inspection capacity required for given values of the listed factors. Experimental results on actual factory data are presented and discussed. |
Year | DOI | Venue |
|---|---|---|
2012 | 10.5555/2429759.2430008 | Winter Simulation Conference |
Keywords | Field | DocType |
production state,production tool,manufacturing process,dynamic control,mathematical model,process tool,dynamic control strategy,control operation,defect inspection capacity,defect inspection control plan,control limit,inspection | Control limits,Production control,Semiconductor technology,Factory,Computer science,Manufacturing engineering,Reliability engineering,Manufacturing process,Automated optical inspection | Conference |
ISSN | ISBN | Citations |
0891-7736 | 978-1-4799-2077-8 | 2 |
PageRank | References | Authors |
0.46 | 1 | 3 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Gloria Luz Rodríguez-Verján | 1 | 5 | 1.41 |
| Stéphane Dauzère-Pérès | 2 | 740 | 65.50 |
| Jacques Pinaton | 3 | 19 | 12.98 |