Paper Info
Title
New topic session 7B: Challenges and opportunities in test and design for test (DFT) of MEMS sensors.
Abstract
MEMS sensors are driving the internet of things and the market for MEMS is growing rapidly. In many MEMS products, test strategies are not standardized, proprietary, and considered important intellectual property. However, an eco-system is beginning to form as equipment makers are developing dedicated MEMS test equipment and test houses offer services for testing MEMS. This talk describes the challenges and opportunities for MEMS testing. Current MEMS testing is compared to the established methods of VLSI test. The talk further describes how design for test concepts can be applied to MEMS design. Finally, testing MEMS integrated within larger systems is highlighted.
Year
DOI
Venue
2014
10.1109/VTS.2014.6818777
VTS
Keywords
Field
DocType
sensors,very large scale integration,testing,packaging
Design for testing,Test equipment,Microelectromechanical systems,Computer science,Internet of Things,MEMS testing,Electronic engineering,Mems sensors,Very-large-scale integration,Test strategy
Conference
Citations 
PageRank 
References 
0
0.34
0
Authors
4
Name
Order
Citations
PageRank
Bozena Kaminska100.68
Bernard Courtois2132.54
Bozena Kaminska31155189.76
Mary Ann Maher400.34