Name
Abstract | ||
|---|---|---|
In this paper, we propose a new technique to accurately decompose process variation into two different components: (1) spatially correlated variation, and (2) uncorrelated random variation. Such variation decomposition is important to identify systematic variation patterns at wafer and/or chip level for process modeling, control and diagnosis. We demonstrate that spatially correlated variation carries a unique sparse signature in frequency domain. Based upon this observation, an efficient sparse regression algorithm is applied to accurately separate spatially correlated variation from uncorrelated random variation. An important contribution of this paper is to develop a fast numerical algorithm that reduces the computational time of sparse regression by several orders of magnitude over the traditional implementation. Our experimental results based on silicon measurement data demonstrate that the proposed sparse regression technique can capture spatially correlated variation patterns with high accuracy. The estimation error is reduced by more than 3.5x compared to other traditional methods.
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Year | DOI | Venue |
|---|---|---|
2011 | 10.1109/ICCAD.2011.6105321 | ICCAD |
Keywords | Field | DocType |
systematic variation pattern,uncorrelated random variation,efficient sparse regression algorithm,spatially correlated variation,proposed sparse regression technique,spatially correlated variation pattern,decompose process variation,separate spatially correlated variation,efficient spatial variation decomposition,variation decomposition,sparse regression,process variation,regression analysis,discrete event simulation,computational complexity,spatial correlation,genetic algorithms,cmos integrated circuits,frequency domain,chip,spatial variation,process model | Frequency domain,Random variable,Computer science,Regression analysis,Electronic engineering,Spatial variability,Process variation,Genetic algorithm,Computational complexity theory,Discrete event simulation | Conference |
ISSN | ISBN | Citations |
1933-7760 | 978-1-4577-1398-9 | 6 |
PageRank | References | Authors |
0.65 | 10 | 5 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Wangyang Zhang | 1 | 138 | 9.98 |
| Karthik Balakrishnan | 2 | 10 | 11.47 |
| Xin Li | 3 | 709 | 48.36 |
| Duane Boning | 4 | 201 | 49.37 |
| Rob A. Rutenbar | 5 | 2283 | 280.48 |