Name
Abstract | ||
|---|---|---|
A cluster tool consists of several wafer processing modules and material handling robot(s). Cluster tools are being prevalently used for semiconductor manufacturing. The scheduling problem is complicated due to no intermediate buffer and diverse wafer flow patterns. We examine the scheduling problem when operations are repetitively performed in a cyclic order. We propose a way of modeling a Petri net for cluster tool operation. By examining the Petri net model, we develop a mixed integer programming model as a version of well-known assignment problem for determining a deadlock-free optimal schedule that maximizes the throughput rate. By using well-known efficient algorithms for assignment problems, we efficiently compute an optimal schedule for dual-armed or single-armed cluster tools, cluster tools with reentrant wafer flows and cyclic cleaning operations. |
Year | DOI | Venue |
|---|---|---|
2008 | 10.1109/COASE.2008.4626441 | CASE |
Keywords | Field | DocType |
material handling robot,mixed integer programming model,scheduling,materials handling equipment,petri nets,wafer processing module,petri net model,integer programming,deadlock-free optimal schedule,cyclic cleaning operation,reentrant wafer flow,scheduling problem,semiconductor device manufacture,robotized cluster tool,industrial robots,single-armed cluster tool,semiconductor manufacturing,cleaning,automation,petri net,assignment problem | Throughput (business),Job shop scheduling,Petri net,Scheduling (computing),Semiconductor device fabrication,Real-time computing,Automation,Integer programming,Assignment problem,Engineering,Distributed computing | Conference |
ISSN | ISBN | Citations |
2161-8070 | 978-1-4244-2023-0 | 5 |
PageRank | References | Authors |
0.62 | 5 | 2 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Chihyun Jung | 1 | 50 | 3.06 |
| Tae-Eog Lee | 2 | 285 | 30.02 |