Name
Title | ||
|---|---|---|
On-chip electrostatic discharge protection for CMOS gas sensor systems-on-a-chip (SoC) |
Abstract | ||
|---|---|---|
An on-chip electrostatic discharge (ESD) protection scheme is demonstrated for an emerging technology of microelectromechanical systems (MEMS)-based embedded sensor (ES) system-on-a-chip (SoC). The ESD protection scheme is implemented using ground-referenced multifinger thyristor-type devices optimized for (1) the input/output (I/O) protection, (2) the power supply clamp, and (3) the internal sensors’ electrodes during the micromachining process. The ESD structure developed demonstrates a leakage current below 10−10A, high on-state conductance, and high level of human body model (HBM) immunity. |
Year | DOI | Venue |
|---|---|---|
2006 | 10.1016/j.microrel.2005.12.002 | Microelectronics Reliability |
Keywords | Field | DocType |
electrostatic discharge,chip,leakage current,emerging technology,input output,system on a chip | Human-body model,System on a chip,Leakage (electronics),Surface micromachining,Microelectromechanical systems,Electrostatic discharge,Electronic engineering,CMOS,Engineering,Integrated circuit,Electrical engineering | Journal |
Volume | Issue | ISSN |
46 | 8 | 0026-2714 |
Citations | PageRank | References |
1 | 0.67 | 1 |
Authors | ||
4 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Javier A. Salcedo | 1 | 3 | 3.54 |
| Juin J. Liou | 2 | 51 | 20.34 |
| Muhammad Y. Afridi | 3 | 1 | 0.67 |
| Allen R. Hefner | 4 | 3 | 1.53 |